One-shot neural architecture search (NAS) substantially improves the search efficiency by training one supernet to estimate the performance of every possible child architecture (i.e., subnet). However, the inconsistency of characteristics among subnets incurs serious interference in the optimization, resulting in poor performance ranking correlation of subnets. Subsequent explorations decompose supernet weights via a particular criterion, e.g., gradient matching, to reduce the interference; yet they suffer from huge computational cost and low space separability. In this work, we propose a lightweight and effective local intrinsic dimension (LID)-based method NAS-LID. NAS-LID evaluates the geometrical properties of architectures by calculating the low-cost LID features layer-by-layer, and the similarity characterized by LID enjoys better separability compared with gradients, which thus effectively reduces the interference among subnets. Extensive experiments on NASBench-201 indicate that NAS-LID achieves superior performance with better efficiency. Specifically, compared to the gradient-driven method, NAS-LID can save up to 86% of GPU memory overhead when searching on NASBench-201. We also demonstrate the effectiveness of NAS-LID on ProxylessNAS and OFA spaces. Source code: https://github.com/marsggbo/NAS-LID.